Substrate
Flexible Electronic Substrates
Contamination Challenge
A Laser-based cutting process produces a conductive carbonaceous soot on the polymeric surfaces along the Laser cut pattern which must be removed prior to next steps in the device fabrication process. The soot is a potential cause of electrical shorts and interferes with subsequent electroplating operations.
Solution
Robotic CO2 Composite Spray™ cleaning process and system.
- Benchtop Cartesian robot
- Robot has an end-of-arm spray tool (EOAT ) comprising a single CO2 composite spray applicator
- Cleaning cell with a local exhaust system
Benefits
- 100% dry processing – Dry-In/Dry-Out
- Selective cleaning (contaminated Laser cutout pattern)
- Low operational cost
- Minimal labor input
