U.S. Patent 8,021,489

Title: Substrate treatment process

 

Inventor(s): David Jackson

Date Issued: September 20, 2011

Technology Platform: Hybrid Particle-Plasma™

Internet Link: U.S. Patent No. 8,021,489  https://www.google.com/patents/US8021489

 

  • SnoPen™ Benchtop Spray Cleaning Systems
  • OzoKool™ Tunable MQCL™ Systems
  • 2Cool Tool™ Thermal Management Systems
  • Mobi™ Mobile Spray Cleaning Systems
  • GENESYS™ Vector Pro™ Spray Treatment Systems
  • PowerSno™ Modular Spray Treatment Platform
  • Vector Pro™ CO2 Composite Spray Applicators
  • Clean Cell™ CO2 Spray Processing Minienvironments
  • Vulcon Ice™ Robotic Spray Cleaning Systems
  • OZPEN™ (Licensed Private Label Product, OZ Optics Ltd.)
  • CleanMaster™ (Licensed Private Label Product, Reliabotics LLC)

 

Abstract

A method of forming a plasma to physicochemically modify properties of a fluid spray in a substrate treatment processes includes providing an applicator in proximity to the substrate. The applicator comprises an electrically insulated main body portion containing a cavity, a tube axially positioned within the cavity for transporting a first fluid, an annular electric-field generator positioned within the cavity between the main body portion and the tube, a region between the tube and the generator for transporting a second fluid, and a nozzle connected to the main body portion for mixing the first fluid with the second fluid to form the fluid spray. The tube, the nozzle or the substrate are selectively grounded. Upon activating the electric-field generator, plasma is formed within the tube or about the region between the tube and the generator when the tube is grounded, within the nozzle when the nozzle is grounded or between the nozzle and the substrate when the substrate is grounded.

Related Patents

  • Taiwan Patent I577452 – Apparatus for forming and regulating a CO2 composite spray
  • U.S. Patent 9,387,511 – Particle-plasma ablation process for polymeric ophthalmic substrate surface
  • U.S. Patent 9,227,215 – Determination of composition and structure of a CO2 composite spray
  • U.S. Patent 9,221,067 – CO2 composite spray method and apparatus
  • U.S. Patent 8,197,603 – Method and apparatus for treating a substrate with dense fluid and plasma
  • U.S. Patent 7,901,540 – Dense fluid delivery apparatus
  • U.S. Patent 7,451,941 – Dense fluid spray cleaning process and apparatus
  • U.S. Patent 7,225,819 – Apparatus process and method for mounting and treating a substrate
  • U.S. Patent 6,979,362 – Apparatus and process for the treatment, delivery and recycle of process fluids used in dense phase carbon dioxide applications
  • U.S. Patent 6,656,017 – Method and apparatus for creating an open cell micro-environment for treating a substrate with an impingement spray
  • U.S. Patent 5,725,154 – Dense fluid spray cleaning method and apparatus
  • Patents Pending – Passive electrostatic CO2 composite spray applicator